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#5단계의 변경 사항

Miroslav Djuric- 에 의해 수정

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단계 라인

-[* black] Shown in this photo is the ST LYPR540AH Tri-axis MEMS gyroscope.
-[* black] To achieve the linear displacement needed to sense movement, a plate called a proof mass is [link|http://en.wikipedia.org/wiki/Oscillate|oscillated] by capacitive actuators.
-[* black] When the package is rotated about the X or Y axes (in the plane of the die surface), [link|http://en.wikipedia.org/wiki/Coriolis_effect|coriolis] forces cause the plate to move perpendicular to the die surface. When the package is rotated about the Z axis (perpendicular to the plane of the die surface), the resulting displacement of the mass is in the plane of the die surface.
+[* black] Shown in these photos is the ST LYPR540AH Tri-axis MEMS gyroscope, shot by a scanning electron microscope ([link|http://en.wikipedia.org/wiki/Scanning_electron_microscope|SEM]).
+[* black] MEMS devices require extremely complicated and sensitive [link|http://en.wikipedia.org/wiki/Microelectromechanical_systems#MEMS_manufacturing_technologies|manufacturing procedures] to produce the kind of accuracy needed for reliable sensors.
+[* black] Most MEMS devices require a combination of deposition of a film layer, patterning to mask off areas of the deposited film to remain after etching, and etching to remove excess metallic film to achieve the final product.

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